Browsing by Author "Teppei, Nakano"
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Publication Controlled ALE-type recess of molybdenum for future logic and memory applications
Proceedings paper2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021Publication Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer
Journal article2024, MICROELECTRONIC ENGINEERING, (294) 15 November, p.Art. 112246