Publication:

Controlled ALE-type recess of molybdenum for future logic and memory applications

Date

2021

Proceedings Paper

https://doi.org/10.1109/IITC51362.2021.9537407

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Author(s)

;

;

Iwasaki, Akihisa

;

;

Altamirano Sanchez, Efrain

Journal

na

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1206 since deposited on 2023-06-20

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Acq. date: 2026-02-24