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Controlled ALE-type recess of molybdenum for future logic and memory applications
Publication:
Controlled ALE-type recess of molybdenum for future logic and memory applications
Date
2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537407
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Teppei, Nakano
;
Iwasaki, Akihisa
;
Iwahata, Shota
;
Altamirano Sanchez, Efrain
Journal
na
Abstract
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1199
since deposited on 2023-06-20
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Acq. date: 2025-10-25
Citations
Metrics
Views
1199
since deposited on 2023-06-20
409
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations