Publication:

Controlled ALE-type recess of molybdenum for future logic and memory applications

Date

2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537407
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-6330-5053
cris.virtual.orcid0000-0003-3235-6055
cris.virtualsource.departmentd9077a5e-4edd-459f-acd8-da1f0d07f2c7
cris.virtualsource.departmentc0e5c06a-f569-4f62-a5cf-b14572adec89
cris.virtualsource.orcidd9077a5e-4edd-459f-acd8-da1f0d07f2c7
cris.virtualsource.orcidc0e5c06a-f569-4f62-a5cf-b14572adec89
dc.contributor.authorPacco, Antoine
dc.contributor.authorTeppei, Nakano
dc.contributor.authorIwasaki, Akihisa
dc.contributor.authorIwahata, Shota
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecAltamirano Sanchez, Efrain::0000-0003-3235-6055
dc.date.accessioned2023-08-10T09:12:50Z
dc.date.available2023-06-20T10:34:36Z
dc.date.available2023-08-10T09:12:50Z
dc.date.issued2021
dc.identifier.doi10.1109/IITC51362.2021.9537407
dc.identifier.eisbn978-1-7281-7632-1
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41856
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedateJUL 06-09, 2021
dc.source.conferencelocationKyoto
dc.source.journalna
dc.source.numberofpages3
dc.subject.keywordsMECHANISM
dc.subject.keywordsKINETICS
dc.subject.keywordsAMMONIA
dc.title

Controlled ALE-type recess of molybdenum for future logic and memory applications

dc.typeProceedings paper
dspace.entity.typePublication
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