Publication:
Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer
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139 since deposited on 2024-08-07
1last month
Acq. date: 2026-01-07
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Views
139 since deposited on 2024-08-07
1last month
Acq. date: 2026-01-07
Citations