Publication:
Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer
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146 since deposited on 2024-08-07
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Acq. date: 2026-08-09
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Statistics
Views
146 since deposited on 2024-08-07
5last month
2last week
Acq. date: 2026-08-09
Citations