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Browsing by Author "Terwagne, G."

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    Advanced characterization of high-K materials: a nuclear approach

    Brijs, Bert
    ;
    Huyghebaert, Cedric  
    ;
    Nauwelaerts, Sophie
    ;
    Caymax, Matty  
    ;
    Vandervorst, Wilfried  
    Journal article
    2002, Nuclear Instruments & Methods in Physics Research B, 190, p.505-509
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    Profile changes and self-sputtering during low energy ion implantation

    Vandervorst, Wilfried  
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    Janssens, Tom
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    Brijs, Bert
    ;
    Lindsay, Richard
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    Collart, E.J.H.
    Proceedings paper
    2002, Silicon Front-End Junction Formation Technologies, 1/04/2002, p.C7.2
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    Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

    Brijs, Bert
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    Huyghebaert, Cedric  
    ;
    Nauwelaerts, Sophie
    ;
    Caymax, Matty  
    ;
    Vandervorst, Wilfried  
    Oral presentation
    2001, 15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia.

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