Browsing by Author "Tillocher, T"
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Publication A novel low temperature etch approach to reduce ULK plasma damage
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015Publication Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015