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Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis
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1988 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-11
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Metrics
Views
1988 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-11
Citations