Browsing by Author "Ulea, Neli"
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Publication Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring
Proceedings paper2014, 25th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 19/05/2014, p.283-287Publication Using the low frequency component of the background signal for SiGe and Ge growth monitoring
Proceedings paper2015, 26th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 3/05/2015Publication Within-die and within-wafer CMP process characterization and monitoring using PWG Fizeau interferometry system
Oral presentation2016, Yield Management Solutions China 2016Publication Within-die and within-wafer CMP process characterization and monitoring using PWG Fizeau interferometry system
Meeting abstract2016, International Conference on Planarization Technology - ICPT, 17/10/2016