Browsing by Author "Urbanowicz, A."
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Publication 300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124961XPublication Near-interfacial thermal donor generation during processing of (100)Si/low-k Si-oxycarbide insulator structures revealed by electron spin resonance
Journal article2014, Semiconductor Science and Technology, (29) 9, p.955008Publication Plasma processing of low-k dielectrics
Journal article2013, Journal of Applied Physics, (113) 4, p.41101