Browsing by Author "Vaenkatesan, Vidya"
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Publication Evaluation of local CD and placement distribution on EUV mask and its impact on wafer
Proceedings paper2019, XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology 2019, 16/04/2019, p.1117807-1-1117807-7Publication Impact of an etched EUV mask black border on imaging and overlay
Publication LCDU decomposition and scaling: mask and resist effects on local MEEF and stochastics
Proceedings paper2024, 2024 International Conference on Extreme Ultraviolet Lithography, SEP 30-OCT 03, 2024, p.Art. 132150Q