Publication:

LCDU decomposition and scaling: mask and resist effects on local MEEF and stochastics

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3034695

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Author(s)

Gustas, Dominykas

;

;

Oorschot, Dorothe

;

;

Van Loo, Hilbert

;

;

Vaenkatesan, Vidya

;

Colina, Alberto

;

van Rhee, Tasja

Journal

Proceedings of SPIE

Metrics

116 since deposited on 2025-05-11

Acq. date: 2026-01-08