Browsing by Author "Valckx, Nick"
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Publication Electrochemical and analytical study of the Si etching
Valckx, NickOral presentation2010, 10de Vlaams Jongerencongres van de Chemie - VJCPublication Electrochemical and analytical study of the Si etching mechanism in HF
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.383-389Publication Electrochemical and analytical study of the Si etching mechanism in HF
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2102Publication Investigation of metallic contamination analysis using vapor phase decomposition – droplet collection – total reflection X-ray fluorescence (VPD-DC-TXRF) for Pt-group elements on silicon wafers
Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.273-276Publication Lossless solvent-based extension implant strip
Meeting abstract2009, 216th ECS Meeting, 4/09/2009, p.2076Publication Lossless solvent-based extension implant strip
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.179-186Publication Study of the etching mechanism of heavily doped Si in HF
Meeting abstract2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 20/09/2010, p.158-159Publication Wet etching of heavily doped Si in HF: a mechanistic study
Valckx, NickOral presentation2010, KNCV Electrochemical Symposium