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Conference contributions
Electrochemical and analytical study of the Si etching mechanism in HF
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Electrochemical and analytical study of the Si etching mechanism in HF
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Valckx, Nick
;
Vos, Rita
;
Rip, Jens
;
Doumen, Geert
;
Mertens, Paul
;
Bearda, Twan
;
Heyns, Marc
;
De Gendt, Stefan
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1915
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Acq. date: 2025-12-11
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Views
1915
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-11
Citations