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Browsing by Author "Van Meirhaeghe, R."

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    A ballistic electron-emission microscopy (BEEM)-investigation of the effects of chemical pretreatments on III-V semiconductor Schottky barriers

    Van Meirhaeghe, R.
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    Vanalme, G.
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    Goubert, L.
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    Cardon, F.
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    Van Daele, P.
    Oral presentation
    1998, MRS Spring Meeting 1998. Symposium S: Nanoscale Characterization Using Scanning Probes; April 13-16, 1998; San Francisco, CA, US
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    CoSi2 formation using a Ti capping layer - influence of processing conditions on CoSi2 nucleation

    Detavernier, C.
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    Van Meirhaeghe, R.
    ;
    Maex, Karen  
    Oral presentation
    2001, Symposium K of the MRS Spring Meeting: Gate Stack and Silicide Issues in Si Processing II; 16-20 April 2001; San Francisco, CA,
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    Electrical transport in (100)CoSi2/Si contacts

    Lauwers, A.
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    Kyllesbech Larsen, K.
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    Van Hove, Marleen
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    Verbeeck, Rita  
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    Maex, Karen  
    Journal article
    1995, J. Appl. Phys., (77) 6, p.2525-36
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    The influence of Ti capping layers on CoSi2 formation

    Detavernier, C.
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    Donaton, R.
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    Maex, Karen  
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    Van Meirhaeghe, R.
    ;
    Cardon, F.
    Oral presentation
    1999, European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
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    The influence of Ti capping layers on CoSi2 formation in the presence of interfacial oxide

    Detavernier, C.
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    Alves Donaton, Ricardo
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    Maex, Karen  
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    Jin, S.
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    Bender, Hugo  
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    Van Meirhaeghe, R.
    Proceedings paper
    1999, Advanced Interconnects and Contacts, 05/04/1999, p.139-144
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    The influence of TiN on the thermal stability of CoSi2

    Detavernier, C.
    ;
    Ruttens, Gerlinde
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    Van Meirhaeghe, R.
    ;
    Maex, Karen  
    Oral presentation
    2001, Symposium K of the MRS Spring Meeting: Gate Stack and Silicide Issues in Si Processing II; 16-20 April 2001; San Francisco, CA,

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