Browsing by Author "Van Meirhaeghe, R.L."

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Proceedings paper

2001, Semiconductor Technology - ISTC, p.540-548

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CoSi2 formation in the presence of carbon

Detavernier, C.

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Van Meirhaeghe, R.L.

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Bender, Hugo

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Richard, Olivier

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Brijs, Bert

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Journal article

2002, Journal of Applied Physics, (92) 3, p.1207-1211

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In situ studies of Pd/Ge layers for ohmic contact on GaAs and InGaAs

Firrincieli, Andrea

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Meuris, Marc

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Claeys, Cor

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Detavernier, C.

Meeting abstract

2009, 215th ECS Meeting, 24/05/2009, p.37

Publication

In-situ curvature and diffraction measurements on thin-film Ni/Ge(100) and Ni/Ge(111) solid state reactions

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Deduytsche, D.

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Detavernier, C.

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Lavoie, C.

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Van Meirhaeghe, R.L.

Meeting abstract

2007, Materials for Advanced Metallization. Abstracts Book, 4/03/2007

Publication

Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions

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Deduytsche, D.

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Detavernier, C.

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Van Meirhaeghe, R.L.

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Journal article

2007, Applied Physics Letters, (90) 3, p.31906

Publication

Influence of processing conditions on CoSi2 formation in the presence of a Ti capping layer

Detavernier, C.

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Van Meirhaeghe, R.L.

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Vandervorst, Wilfried

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Journal article

2004, Microelectronic Engineering, (71) 3_4, p.252-261

Publication

Low-temperature formation of CoSi2 in the presence of Au

Detavernier, C.

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Lavoie, C.

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d'Heurle, F.M.

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Bender, Hugo

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Van Meirhaeghe, R.L.

Journal article

2004, Journal of Applied Physics, (95) 10, p.5340-5346

Publication

Metal in-diffusion during Fe and Co-germanidation of germanium

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Claeys, Cor

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Detavernier, C.

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Van Meirhaeghe, R.L.

Proceedings paper

2008, Gettering and Defect Engineering in Semiconductor Technology XII, 14/10/2007, p.47-52

Publication

Mixing entropy and the nucleation of silicides: Ni-Pd-Si and Co-Mn-Si ternary systems

Detavernier, C.

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Qu, X.P.

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Van Meirhaeghe, R.L.

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Li, B.Z.

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Journal article

2003, Journal of Materials Research, (18) 7, p.1668-1678

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Ni-germanide contacts on Ge: phase formation and electrical characterization

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Detavernier, C.

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Lavoie, C.

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Van Meirhaeghe, R.L.

Oral presentation

2007, MRS Spring Meeting Symposium G: Extending Moore's Law with Alternative Channel Materials

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Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

De Keyser, K.

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Van Bockstael, C.

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Van Meirhaeghe, R.L.

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Detavernier, C.

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Verleysen, Eveline

Journal article

2010, Applied Physics Letters, (96) 17, p.173503

Publication

Point-defect generation in Ni-, Pd-, and Pt-germanide Schottky barriers on n-type germanium

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Claeys, Cor

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Detavernier, C.

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Van Meirhaeghe, R.L.

Journal article

2007, Journal of the Electrochemical Society, (154) 10, p.H857-H861

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Texture of atomic layer deposited ruthenium

Musschoot, J.

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Xie, Q.

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Deduytsche, D.

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De Keyser, K.

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Longrie, D.

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Haemers, J.

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Van den Berghe, S.

Journal article

2010, Microelectronic Engineering, (87) 10, p.1879-1883

Publication

The barrier height inhomogeneity in identically prepared Au/n-GaAs Schottky barrier diodes

Leroy, W.P.

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