Browsing by Author "Van den Berg, Jaap"
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Publication Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
Journal article2017, Chemistry of Materials, (29) 11, p.4654-4666Publication High resolution depth profile analysis of ultra-thin STO/TiN layers on Si by LEIS
Publication Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness
Journal article2013, Applied Surface Science, 281, p.8-16Publication Understanding the interface reactions of rutile TiO2 grown by atomic layer deposition on oxidized ruthenium
Journal article2013, ECS Journal of Solid State Science and Technology, (2) 1, p.N23-N27