Browsing by Author "Vanpaemel, Johannes"
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Publication Acoustic meta-materials in MEMS bar resonators
Proceedings paper2010-02, International Conference on Metamaterials, Photonic crystals and Plasmonics - META, 22/02/2010Publication Dual role of hydrogen in low temperature plasma enhanced carbon nanotube growth
Journal article2015, Journal of Physical Chemistry C, (119) 32, p.18293-18302Publication Effect of boric acid on the nucleation and growth of Ni nanoparticles for CNT growth
Meeting abstract2012, 222nd ECS Fall Meeting - PRiME, 7/10/2012, p.3515Publication Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
Proceedings paper2012, IEEE International Interconnect Technology Conference - IITC, 4/06/2012Publication Electrochemical deposition of sub-nanometer Ni films on TiN
Journal article2014, Langmuir, (30) 8, p.2047-2053Publication Enhanced nucleation of Ni nanoparticles on TiN through H3BO3-mediated growth inhibition
Journal article2013, Electrochimica Acta, 109, p.411-418Publication EUV lithography imaging using novel pellicle membranes
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.977620Publication From high-density nanoparticle deposits to nanometer thin continuous by growth inhibited nucleation enhancement
Meeting abstract2014, 226th Meeting of the Electrochemical Society, 5/10/2014, p.912Publication Growth and integration challenges for carbon nanotubes interconnects
Journal article2014, Microelectronic Engineering, 120, p.188-193Publication Growth-inhibited nucleation of Ni nanoparticles on TiN substrates
Meeting abstract2013, 224th Meeting of the Electrochemical Society, 27/10/2013, p.2372Publication Introducing the EUV CNT pellicle
Meeting abstract2016, Photomask Technology 2016, 12/09/2016, p.99850CPublication Low temperature CNT growth for BEOL interconnects
Oral presentation2013, MRS Fall MeetingPublication Low temperature CNT growth kinetics for interconnects
Meeting abstract2013, MRS Fall Meeting, 1/06/2013Publication Optical testing of EUV pellicle materials
Oral presentation2015, International Symposium on Extreme LithographyPublication Properties and performance of EUVL pellicle membranes
Proceedings paper2015, International Symposium on Extreme Ultraviolet Lithography, 5/10/2015Publication Properties and performance of EUVL pellicle membranes
Proceedings paper2015, SPIE Photomask Technology, 29/09/2015, p.96350XPublication The development of an EUVL pellicle comprising carbon nanomaterials
Meeting abstract2016, Materials for Advanced Metallization Conference - MAM, 20/03/2016, p.165-166Publication The formation mechanism of 3D anodized aluminum oxide templates from an aluminum film with copper impurities
Journal article2015, Journal of Physical Chemistry C, (119) 4, p.2105-2112