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Conference contributions
Low temperature CNT growth kinetics for interconnects
Publication:
Low temperature CNT growth kinetics for interconnects
Date
2013
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanpaemel, Johannes
;
Masahito, Sugiura
;
Cott, Daire
;
van der Veen, Marleen
;
Tokei, Zsolt
;
De Gendt, Stefan
;
Vereecken, Philippe
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Abstract
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1898
since deposited on 2021-10-21
Acq. date: 2025-10-27
Citations
Metrics
Views
1898
since deposited on 2021-10-21
Acq. date: 2025-10-27
Citations