Publication:

Low temperature CNT growth kinetics for interconnects

Date

2013
Meeting abstract
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dc.contributor.authorVanpaemel, Johannes
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorCott, Daire
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-21T13:49:09Z
dc.date.available2021-10-21T13:49:09Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23302
dc.source.conferenceMRS Fall Meeting
dc.source.conferencedate1/06/2013
dc.source.conferencelocationBoston USA
dc.title

Low temperature CNT growth kinetics for interconnects

dc.typeMeeting abstract
dspace.entity.typePublication
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