Browsing by Author "Vasil'eva, A.N."

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1-D model of OSG low-k films modification by EUV/VUV emission

Rakhimova, T.V.
;
Rakhimov, A.T.
;
Mankelevich, Y.A.
;
Lopaev, D.V.
;
Ziryanov, S.M.
;
Kovalev, A.S.
Meeting abstract
2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013
Low-k films modification under EUV and VUV radiation

Rakhimova, T.
;
Rakhimov, A.
;
Mankelevich, Y.A.
;
Lopaev, D.V.
;
Kovalev, A.S.
;
Vasil'eva, A.N.
Journal article
2014, Journal of Physics D: Applied Physics, (47) 2, p.25102