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Browsing by Author "Vats, H."

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    Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations

    Vega Gonzalez, Victor  
    ;
    Montero Alvarez, Daniel  
    ;
    Versluijs, Janko  
    ;
    Varela Pedreira, Olalla  
    Proceedings paper
    2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021

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