Browsing by Author "Vats, H."
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Publication Logic and memory patterning breakthrough using High-NA lithography
Proceedings paper2024, 2024 Conference on Photomask Technology, 2024-09-29, p.1321604Publication Moore's Law meets High-NA EUV: Random via patterning for next-generation nodes
Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-22, p.1342412-1-1342412-7Publication Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations
Proceedings paper2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021