Publication:

Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations

Date

2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537535
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Author(s)

Vega Gonzalez, Victor  
;
Montero Alvarez, Daniel  
;
Versluijs, Janko  
;
Varela Pedreira, Olalla  
;
Jourdan, Nicolas  
;
Puliyalil, Harinarayanan  
;
Chehab, Bilal  
;
Peissker, Tobias
;
Haider, Ali
;
Batuk, Dmitry  
;
Martinez Alanis, Gerardo Tadeo  
;
Geypen, Jef  
;
Le, Quoc Toan  
;
Bazzazian, Nina  
;
Heylen, Nancy  
;
van der Veen, Marleen  
;
El-Mekki, Zaid  
;
Webers, Tomas  
;
Vats, H.
;
Rynders, Luc  
;
Cupak, Miroslav  
;
Lee, Jae Uk  
;
Drissi, Youssef  
;
Halipre, Luc  
;
Gillijns, Werner  
;
Charley, Anne-Laure  
;
Verdonck, Patrick  
;
Witters, Thomas  
;
Van Gompel, Sander  
;
Kimura, Yosuke  
;
Ciofi, Ivan  
;
De Wachter, Bart  
;
Swerts, Johan  
;
Grieten, Eva  
;
Ercken, Monique  
;
Kim, Ryan Ryoung han
;
Croes, Kristof  
;
Leray, Philippe  
;
Jaysankar, Manoj  
;
Nagesh, Nishanth  
;
Ramakers, Leon  
;
Murdoch, Gayle  
;
Park, Seongho  
;
Tokei, Zsolt  
;
Dentoni Litta, Eugenio  
;
Horiguchi, Naoto  

Journal

na

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1768 since deposited on 2022-05-05
2last month
Acq. date: 2025-12-12

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1768 since deposited on 2022-05-05
2last month
Acq. date: 2025-12-12

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