Publication:

Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations

Date

2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537535
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dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorMontero Alvarez, Daniel
dc.contributor.authorVersluijs, Janko
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorPuliyalil, Harinarayanan
dc.contributor.authorChehab, Bilal
dc.contributor.authorPeissker, Tobias
dc.contributor.authorHaider, Ali
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorMartinez Alanis, Gerardo Tadeo
dc.contributor.authorGeypen, Jef
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorBazzazian, Nina
dc.contributor.authorHeylen, Nancy
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorWebers, Tomas
dc.contributor.authorVats, H.
dc.contributor.authorRynders, Luc
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorMontero Alvarez, Daniel
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorPuliyalil, Harinarayanan
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorMartinez Alanis, Gerardo Tadeo
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorBazzazian, Nina
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorWebers, Tomas
dc.contributor.imecauthorVats, H.
dc.contributor.imecauthorRynders, Luc
dc.contributor.imecauthorCupak, Miroslav
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecVega Gonzalez, Victor::0000-0002-4320-0585
dc.contributor.orcidimecMontero Alvarez, Daniel::0000-0001-9966-0399
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.contributor.orcidimecPuliyalil, Harinarayanan::0000-0002-9749-5307
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.contributor.orcidimecMartinez Alanis, Gerardo Tadeo::0000-0001-5036-0491
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecEl-Mekki, Zaid::0000-0002-9851-9139
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecWitters, Thomas::0000-0002-8528-9469
dc.contributor.orcidimecKimura, Yosuke::0000-0002-9098-0414
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecGrieten, Eva::0000-0001-6328-7633
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.date.accessioned2022-05-11T09:58:50Z
dc.date.available2022-05-05T02:17:25Z
dc.date.available2022-05-11T09:58:50Z
dc.date.issued2021
dc.identifier.doi10.1109/IITC51362.2021.9537535
dc.identifier.eisbn978-1-7281-7632-1
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39735
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedateJUL 06-09, 2021
dc.source.conferencelocationVirtual
dc.source.journalna
dc.source.numberofpages3
dc.title

Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations

dc.typeProceedings paper
dspace.entity.typePublication
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