Browsing by Author "Viatkina, Katja"
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Publication Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250KPublication Integrated approach to improving local CD uniformity in EUV patterning
Proceedings paper2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.1014319