Browsing by Author "Vitchev, R."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Interfacial chemistry at high-k oxide layers on pretreated silicon wafers: XPS and TOF-SIMS study
Oral presentation2004, 31st Conference on the Physics and Chemistry of Semiconductor InterfacesPublication Physical characterization of thin HfO2 layers by the combined analysis with complementary techniques
Proceedings paper2003, Analytical Techniques for Semiconductor Materials and Processes, 27/04/2003, p.223-232