Publication:
Interfacial chemistry at high-k oxide layers on pretreated silicon wafers: XPS and TOF-SIMS study
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1919 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-08
Citations
Metrics
Views
1919 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-08
Citations