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Interfacial chemistry at high-k oxide layers on pretreated silicon wafers: XPS and TOF-SIMS study
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1920 since deposited on 2021-10-15
1last month
Acq. date: 2026-03-18
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Views
1920 since deposited on 2021-10-15
1last month
Acq. date: 2026-03-18
Citations