Publication:

Physical characterization of thin HfO2 layers by the combined analysis with complementary techniques

Date

2003

Proceedings Paper

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Author(s)

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Conard, Thierry

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Richard, Olivier

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Vandervorst, Wilfried

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Wolstenholme, J.

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Statistics

1937 since deposited on 2021-10-15

Acq. date: 2026-03-16