Browsing by Author "Viva, Alessandro"
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Publication Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition
Journal article2021-03-06, ACS APPLIED ELECTRONIC MATERIALS, (3) 6, p.2622-2630Publication Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
Journal article2022-03-29, ACS Applied Electronic Materials, (4) 4, p.1703-1714