Publication:

Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition

Date

2021-03-06
Journal article
https://doi.org/10.1021/acsaelm.1c00219
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Author(s)

Pasquali, Mattia  
;
Sergeant, Stefanie  
;
Conard, Thierry  
;
Spampinato, Valentina  
;
Viva, Alessandro  
;
De Gendt, Stefan  
;
Armini, Silvia  

Journal

ACS APPLIED ELECTRONIC MATERIALS

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