Publication:

Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition

Date

2021-03-06
Journal article
https://doi.org/10.1021/acsaelm.1c00219
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dc.contributor.authorPasquali, Mattia
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorConard, Thierry
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorViva, Alessandro
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorArmini, Silvia
dc.contributor.imecauthorPasquali, Mattia
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorViva, Alessandro
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidextAlessandro, Viva::0000-0002-6349-8075
dc.contributor.orcidimecPasquali, Mattia::0000-0002-1309-1082
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2022-05-06T09:37:43Z
dc.date.available2021-11-02T16:00:11Z
dc.date.available2022-05-06T08:13:01Z
dc.date.available2022-05-06T09:37:43Z
dc.date.embargo9999-12-31
dc.date.issued2021-03-06
dc.identifier.doi10.1021/acsaelm.1c00219
dc.identifier.issn2637-6113
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37809
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage2622
dc.source.endpage2630
dc.source.issue6
dc.source.journalACS APPLIED ELECTRONIC MATERIALS
dc.source.numberofpages9
dc.source.volume3
dc.subject.keywordsPULSED-FORCE MODE
dc.subject.keywordsarea-selective deposition
dc.subject.keywordsself-assembled monolayer
dc.subject.keywordsatomic force microscopy
dc.subject.keywordstip-sample adhesion force
dc.title

Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition

dc.typeJournal article
dspace.entity.typePublication
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