imec Institutional Repository Browsing {{ collection }} by Author "Voronina, E."

Publication

Dry cleaning of WS2 using reducing downstream plasma

de Marneffe, Jean-Francois

;

Marinov, Daniil

;

Zhang, Jianran

;

With, Patrick

;

Smets, Quentin

Meeting abstract

2019, PESM 2019, 20/05/2019

Publication

Interaction of atomic fluorine with porous low-k SiCOH films: modeling

Palov, A.

;

Voronina, E.

;

Lopaev, D.

;

Mankelevich, Y.

;

Rakhimova, T.

;

Zyryanov, S.

;

Proshina, O.

Oral presentation

2015, 22nd International Symposium on Plasma Chemistry - ISPC

Publication

Low-k OSG damage and etching by F atoms at lowered temperatures

Zyryanov, S.

;

Kurchikov, D.

;

Lopaev, D.

;

Mankelevich, Y.

;

Palov, A.

;

Rakhimova, T.

;

Voronina, E.

Oral presentation

2015, 22nd International Symposium on Plasma Chemistry - ISPC

Publication

Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films

Mankelevich, Y.

;

Voronina, E.

;

Rakhimova, T.

;

Palov, A.

;

Lopaev, D.V.

;

Zyryanov, S.M.

Journal article

2016, Journal of Physics D: Applied Physics, (49) 34, p.345203

Browsing by Author "Voronina, E."