Browsing by Author "Wagner, M."
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Publication Copper through silicon vias studied by the photo-elastic Scanning Infrared Microscope SIREX
Journal article2016, Microelectronics Reliability, 64, p.330-335Publication Preparation and characterization of rare earth scandates as alternative gate oxide materials
; ; Proceedings paper2005, 6th European Conference on Ultimate Integration of Silicon - ULIS, 7/04/2005Publication Rare-earth metal scandate high-k layers: promises and problems
Meeting abstract2005, Meeting Abstracts 208th Electrochemical Society Meeting: 3rd International Symposium on High Dielectric Constant Gate Stacks, 16/10/2005Publication Theoretical study of tunneling current in the access region of various heterojunction field-effect transistor structures