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Conference contributions
Rare-earth metal scandate high-k layers: promises and problems
Publication:
Rare-earth metal scandate high-k layers: promises and problems
Date
2005
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Chao
;
Heeg, T.
;
Wagner, M.
;
Schubert, J.
;
Witters, Thomas
;
Brijs, Bert
;
Bender, Hugo
;
Richard, Olivier
;
Afanasiev, Valeri
;
Houssa, Michel
;
Caymax, Matty
;
De Gendt, Stefan
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1923
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1923
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations