Publication:

Rare-earth metal scandate high-k layers: promises and problems

Date

2005
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorZhao, Chao
dc.contributor.authorHeeg, T.
dc.contributor.authorWagner, M.
dc.contributor.authorSchubert, J.
dc.contributor.authorWitters, Thomas
dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorHoussa, Michel
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T07:28:40Z
dc.date.available2021-10-16T07:28:40Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11607
dc.source.conferenceMeeting Abstracts 208th Electrochemical Society Meeting: 3rd International Symposium on High Dielectric Constant Gate Stacks
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
dc.title

Rare-earth metal scandate high-k layers: promises and problems

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions