Browsing by Author "Wagner, Matthias"
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Publication A photo-elastic microscopy study of the temperature dependecy of stress induced by through silicon vias in silicon
Journal article2017, Physica Status Solidi C, (14) 7, p.1700028Publication Defect-induced stress imaging in single and multi-crystalline semiconductor materials
Journal article2018, Materials Today, (5) 6, p.14748-14756Publication Failure and stress analysis of Cu TSVs using
Proceedings paper2015, 41st International Symposium for Testing and Failure Analysis - ISTFA, 1/11/2015, p.119-25Publication Materials characterization and device analysis for evaluation of semiconductor processes by highly-sophisticated photoelastic stress measurement technique
Journal article2015, Physica Status Solidi C, (12) 8, p.1085-1089Publication Photo-elastic characterization of defect structures in mono and multi-crystalline semiconductor materials
Meeting abstract2016-09, Extended Defects in Semiconductors (EDS) Conference, 25/09/2016, p.77