Browsing by Author "Wang, C."
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Publication Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection
Journal article2020, Journal of the Taiwan Institute of Chemical Engineers, 112, p.130-136Publication Impact of Hf-precursor choice on scaling and performance of high-k gate dielectrics
; ;Fedorenko, Yanina; ; ; Proceedings paper2007, Physics and Technology of High-k Gate Dielectrics 5, 7/10/2007, p.59-72