Browsing by Author "Wang, Changhai"
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Publication Laser bonding of glass to silicon using polymer for microsystems packaging
Journal article2007-06, Journal of Microelectromechanical Systems, (16) 3, p.571-580Publication Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
Journal article review2023, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, (36) 1, p.1-13