Browsing by Author "Wang, Fei"
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Publication Accurate micro Hall effect measurement on scribe line pads
Proceedings paper2009, 17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2009Publication Field-free switching of perpendicular magnetization at room temperature using out-of-plane spins from TaIrTe4
Publication Micro probe carrier profiling of ultra-shallow structures in germanium
Proceedings paper2010, Materials and Devices for End-of-Roadmap and Beyond CMOS Scaling, 5/04/2010, p.1252-I05-20Publication Process window and defect monitoring using high-throughput e-beam inspection guided by computational hot spot detection
Publication Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic device
Proceedings paper2016, Metrology, Inspection, and Process Control for Microlithography XXX, 20/02/2016, p.97780O