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Browsing by Author "Wang, Mugwort"

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    Electron trap energy distribution in ALD Al2O3, LaAl4Ox, and GdyAl2-yO3 layers on silicon

    Wang, Mugwort
    ;
    Badylevich, M.
    ;
    Adelmann, Christoph  
    ;
    Swerts, Johan  
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    Kittl, Jorge
    Proceedings paper
    2012, E-MRS Spring Meeting Symposium M: More than Moore: Novel Materials Approaches for Functionalized Silicon Based Microelectronics, 14/05/2012, p.12008
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    Injection and trapping of electrons in Y2O3 layers on Si

    Wang, Mugwort
    ;
    Badylevich, M.
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    Afanasiev, Valeri  
    ;
    Stesmans, Andre  
    ;
    Adelmann, Christoph  
    Journal article
    2010, IOP Conference Series: Materials Science and Engineering, (8) 1, p.12028
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    Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis

    Tomida, Kazuyuki  
    ;
    Popovici, Mihaela Ioana  
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    Swerts, Johan  
    ;
    Wang, Mugwort
    ;
    Kaczer, Ben  
    Proceedings paper
    2011, International Conference on Solid-State Devices and Materials - SSDM, 28/09/2011, p.969-970

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