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Browsing by Author "Wang, Xiaojing"

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    Wafer-level hermetically sealed silicon photonic MEMS

    Jo, Gaehun
    ;
    Edinger, Pierre
    ;
    Bleiker, Simon J.
    ;
    Wang, Xiaojing
    ;
    Takabayashi, Alain Yuji
    Journal article
    2022, PHOTONICS RESEARCH, (10) 2, p.A14-A21
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    Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS

    Joa, Gaehun
    ;
    Edinger, Pierre
    ;
    Bleiker, Simon J.
    ;
    Wang, Xiaojing
    ;
    Takabayashi, Alain Yuji
    Proceedings paper
    2021, Conference on Silicon Photonics XVI, MAR 06-11, 2021

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