Browsing by Author "Wang, Xiaojing"
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Publication Wafer-level hermetically sealed silicon photonic MEMS
;Jo, Gaehun ;Edinger, Pierre ;Bleiker, Simon J. ;Wang, XiaojingTakabayashi, Alain YujiJournal article2022, PHOTONICS RESEARCH, (10) 2, p.A14-A21Publication Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS
;Joa, Gaehun ;Edinger, Pierre ;Bleiker, Simon J. ;Wang, XiaojingTakabayashi, Alain YujiProceedings paper2021, Conference on Silicon Photonics XVI, MAR 06-11, 2021