Browsing by Author "Warad, L."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication 300 mm-wafer characterization of ruthenium area-selective deposition in nanoscale line-space and hole patterns
Meeting abstract2020, 20th International Conference on Atomic Layer Deposition, 2/04/2020, p.AS-TuP-14Publication 300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
; ; ; ; Koret, R.Journal article2023, APPLIED SURFACE SCIENCE, (626) July, p.Art. 157222