Browsing by Author "Watanabe, Hidehiro"
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Publication ABI tool performance confirmation by NXE3300 printing results for native EUV blank defects at 16nm half pitch
Proceedings paper2016-11, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016Publication ABI tool performance confirmed by NXE3300 printing results
Proceedings paper2015-10, EUVL Symposium, 5/10/2015Publication Correlation of actinic blank inspection and experimental phase defect printability study on NXE3x00 EUV scanner
Proceedings paper2015, Extreme Ultraviolet (EUV) Lithography VI, 22/02/2015, p.942216Publication EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection
Proceedings paper2015-07, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII, 20/04/2015, p.96580FPublication EUV scanner printability evaluation of natural blank defects detected by actinic blank inspection
Oral presentation2015, Workshop NGL - The Japan Society of Applied Physics