Browsing by Author "Watso, Robert"
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Publication Litho and patterning challenges for memory and logic applications at the 22nm node
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.76400CPublication Optical path and image performane monitoring of a full-field 157-nm scanner
Proceedings paper2004, Optical Microlithography XVII, 22/02/2004, p.91-98Publication Status and critical challenges for 157nm lithography
Journal article2004, Microelectronic Engineering, 73-74, p.5-10