Browsing by Author "Weidner, K."

Now showing 1 - 2 of 2

Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions

Shamiryan, Denis
;
Weidner, K.
;
Gray, W.D.
;
Baklanov, Mikhaïl
;
Vanhaelemeersch, Serge
;
Maex, Karen
Journal article
2002, Microelectronic Engineering, (64) 1_4, p.361-366
EFTEM as a porosity metrology tool for low-k dielectrics

Hens, S.
;
Bender, Hugo
;
Van Landuyt, J.
;
Iacopi, Francesca
;
Weidner, K.
;
Maex, Karen
Proceedings paper
2002, Conference Book Joint Microscopy Meeting - JMM, 25/06/2002