Publication:
Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1906 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-05-15
Citations
Statistics
Views
1906 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-05-15
Citations