Browsing by Author "Weidner, Ken"
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Publication A new ultra-low K ILD material based on organic-inorganic hybrid resins
Publication Optimization of etching and stripping chemistries for Z3MS TM low-k
Proceedings paper2001, Proceedings of the IEEE 2001 International Interconnect Technology Conference ; 4-6 June 2001; Burlingame, CA, USA., p.174-176