imec Institutional Repository Browsing {{ collection }} by Author "Werner, M."

Publication

Characterization of low energy (2-5keV) implantation into Si

Collart, E.J.

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Kirkwood, D.

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Vandenberg, J.A.

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Werner, M.

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Vandervorst, Wilfried

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Brijs, Bert

Oral presentation

2002, Ion Implantation Conference

Publication

Damage accumulation and dopant migration during shallow As and Sb implantation into Si

Werner, M.

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van den Berg, J.A.

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Armour, D.G.

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Vandervorst, Wilfried

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Collart, E.H.J.

Journal article

2004, Nuclear Instruments & Methods in Physics Research B, 216, p.67-74

Publication

High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si

van den Berg, J.A.

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Armour, D.G.

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Werner, M.

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Whelan, S.

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Vandervorst, Wilfried

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Clarysse, Trudo

Proceedings paper

2002, Proceedings 14th International Conference on Ion Implantation Technology Conference, 22/09/2002, p.597-600

Publication

Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS

Vandervorst, Wilfried

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Conard, Thierry

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Giangrandi, Simone

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Brijs, Bert

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Bergmaier, A.

Meeting abstract

2007, International Workshop on High-Resolution Depth Profiling, 17/06/2007

Publication

Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si

van den Berg, J.A.

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Werner, M.

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Armour, D.G.

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Vandervorst, Wilfried

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Clarysse, Trudo

Meeting abstract

2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.446

Browsing by Author "Werner, M."