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Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
Publication:
Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
Date
2007
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Conard, Thierry
;
Giangrandi, Simone
;
Brijs, Bert
;
Bergmaier, A.
;
Kimura, K.
;
van den Berg, J.A.
;
Werner, M.
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1963
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1963
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations