Publication:
Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Giangrandi, Simone | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Bergmaier, A. | |
| dc.contributor.author | Kimura, K. | |
| dc.contributor.author | van den Berg, J.A. | |
| dc.contributor.author | Werner, M. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-16T21:04:36Z | |
| dc.date.available | 2021-10-16T21:04:36Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13124 | |
| dc.source.conference | International Workshop on High-Resolution Depth Profiling | |
| dc.source.conferencedate | 17/06/2007 | |
| dc.source.conferencelocation | Radebeul Germany | |
| dc.title | Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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