Browsing by Author "Wickramanayaka, S."
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Publication Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study
Proceedings paper2004, Proceedings of the International Symposium on Semiconductor Manufacturing - ISSM, 27/09/2004, p.53-56Publication PVD-HfSiON gate dielectrics with Ni-FUSI electrode for 65nm LSTP application
Journal article2005-06, Microelectronic Engineering, 80, p.198-201